Siab -purity isostatic siab graphite guiding rings yog lub luag haujlwm tseem ceeb ntawm cov thermal teb system ntawm kev rub ncaj qha (CZ) ib leeg siv lead ua silicon rauv. Lawv raug tsim los ntawm 4N / 5N siab- purity isostatic siab dag graphite thiab feem ntau yog ntsia saum lub graphite crucible, nyob rau sab hauv thiab sab nraud ntawm lub raj coj qhia, thiab nyob ib ncig ntawm cov siv lead ua rub channel.
Cov cuab yeej ua haujlwm ntev ntev hauv qhov chaw nqus tsev nrog qhov cua tsis zoo ntawm argon roj, ntawm qhov kub ntawm 1400 txog 1600 degrees Celsius. Nws cov haujlwm tseem ceeb suav nrog kev taw qhia cov roj ntws, txwv qhov chaw thermal, tso cov pas nrig siv lead ua, tiv thaiv kev sib tsoo ntawm silicon vapor, thiab tiv thaiv impurity paug.
Installation qhov chaw thiab structural form
Tej qhov chaw installation
Nws yog muab tso rau hauv lub sab sauv ntawm lub thermal teb ntawm ib leeg siv lead ua rauv, nruab nrab ntawm lub molten silicon kua nto thiab lub sab sauv rwb thaiv tsev cover, nyob ib ncig ntawm lub noob siv lead ua qws thiab loj hlob ib tug siv lead ua silicon pas nrig. Qee cov qauv ua ke nrog lub raj dej qhia.
Main qauv
Zuag qhia tag nrho lub nplhaib- zoo li tus qauv, muab faib ua ib lub nplhaib hom, cais hom sib xyaw ua ke, cov kauj ruam txoj hauj lwm hom, thiab ntau- qhov cua ntws qhia hom; Raws li qhov sib txawv rauv hom ntawm 12-28 ntiv tes, nws tuaj yeem ua cov kab loj loj, nyias-walled, thiab tshwj xeeb-puab qhov chaw grooves thiab lwm cov qauv, nrog rau kev ua haujlwm ntev txog ± 0.01 hli.
Efficiency leap Precision thiab stability
Kev taw qhia huab cua: Tswj cov kev taw qhia ntws ntawm cov roj argon tiv thaiv hauv lub cub tawg kom cov pa tawm mus raws txoj kev preset, tshem tawm cov kab tsis huv thiab cov cua sov vaporized los ntawm silicon kua nto, thiab stabilizing cov cua sab hauv ntawm lub cub tawg.
Thermal field confinement: Siv lub thermal rwb thaiv tsev zoo heev thiab thermal conductivity ntawm graphite, txwv lub radial kub teb, txo qhov kub qhov sib txawv ntawm lub cub tawg, thiab tiv thaiv cov siv lead ua pas nrig los ntawm generating dislocations thiab kab nrib pleb vim txawv txawv nyob rau hauv lub zos kub sib txawv.
Mechanical limit guidance: Muab radial positioning rau ib leeg siv lead ua silicon pas nrig thaum rub los tiv thaiv cov pas nrig siv lead ua los ntawm viav vias lossis tilting, xyuas kom cov pas nrig siv lead ua loj hlob vertically thiab coaxially, thiab txo cov khoom ua txhaum xws li kev tawg thiab cov pas nrig.
Cov ntsiab lus tseem ceeb ua haujlwm
Kev Tiv Thaiv Kev Tiv Thaiv: Tiv thaiv kom tsis txhob muaj kev sib tsoo ntawm siab - kub silicon vapor thiab carbon hmoov, zam lawv txuas rau cov pas nrig siv lead ua, cov rwb thaiv tsev sab saud ntawm lub tshuab hluav taws xob lub cev, thiab lub qhov rais soj ntsuam qhov muag, ua kom cov txheej txheem txuas ntxiv thiab ruaj khov ntawm siv lead ua rub.
Kev tiv thaiv huv: Lub siab -purity substrate tsis tso cov impurities tsis zoo, tiv thaiv cov hlau thiab tshauv impurities los ntawm kev sib xyaw rau hauv silicon yaj thiab siv lead ua qws txij thaum pib.
Core Performance Characteristics (nrog cov ntaub ntawv txhawb nqa)
(1) Ultra- siab purity, huab huv huv (cov ntsiab lus zoo)
Siv cov cuab yeej siv siab -kub sib sib zog nqus purification, cov ntsiab lus ntawm cov pa roj carbon ntau yog ntau dua lossis sib npaug li 99.99% (4N), thiab rau tus qauv hwm, nws tuaj yeem ncav cuag 99.999% (5N); Cov ntsiab lus tshauv tsawg dua lossis sib npaug li 50 ppm, thiab cov hlau tsis huv (Fe, Al, Ca, Cu, thiab lwm yam) tsawg dua lossis sib npaug li 1 ppm. Nyob rau hauv qhov chaw siab -kub nqus tsev vacuum, tsis muaj volatiles los yog hlau vapor emissions, uas yuav tsis paug cov silicon yaj thiab ib tug -crystal silicon pas nrig, kom ntseeg tau cov haiv neeg tsawg carrier lifetime thiab photoelectric hloov dua siab tshiab efficiency ntawm silicon wafer, thiab ua tau raws li high - cov txheej txheem ntawm cov khoom siv hluav taws xob thiab cov khoom siv hluav taws xob.
(2) Isostatic nias, isotropic, ruaj khov qauv
Txias isostatic peb- qhov ntev xovxwm molding, nrog cov khoom sib xws thiab tsis muaj kev taw qhia, qhov ntim ceev yog 1.85 ~ 1.95 g / cm³. Cov khoom siv hluav taws xob thiab cov cua sov zoo ib yam nyob rau hauv txhua qhov kev qhia, thiab nws tsis warp, deform, los yog tawg nyob rau hauv ntev -lub sij hawm siab -kub cycling, tswj qhov tseeb txwv qhov ntev.
(3) siab heev -kub tsis kam, zoo thermal stability thiab thermal shock kuj
Nyob rau hauv lub tshuab nqus tsev / inert cua ntawm argon, qhov ntev -lub sij hawm siv kub yog 1400 ~ 1600 degree, thiab qhov kawg kub kuj tuaj yeem ncav cuag 2200 degree; Lub thermal expansion coefficient tsuas yog 4.0 ~ 4.8 × 10⁻⁶ /℃(chaw kub txog 1500 degree), nrog thermal expansion thiab contraction me me. Tau ntsib qhov hloov pauv kub thiab txias sai thiab cua sov ntawm ib qho -crystal furnace, nws tuaj yeem siv tau ntev, tsis muaj kev pheej hmoo tawg lossis tawg.
leej twg xaiv peb?
1. Kev siv thev naus laus zis: Kev ywj pheej ntawm kev paub txog cov thev naus laus zis ntawm siab - purity graphite, ua tiav 4N / 5N purity qauv, thiab txheej txheej yog tsim los ntawm nws tus kheej thiab ruaj khov dua;
2. ruaj khov zoo: Tag nrho- txheej txheem tswj kom zoo + cov ntawv pov thawj thoob ntiaj teb, nrog rau qhov tseeb qhov tseeb thiab ruaj khov siab - kub ua haujlwm;
3. Kev hloov kho sai: Ua tiav nrog 12-28 ntiv tes ntawm txhua hom rauv, cov qauv tuaj yeem tsim nyob rau hauv 7 hnub, thiab batch xa tuaj yeem ua tiav hauv 15 hnub;
4. Tus nqi- zoo: Cov khoom siv ntsug ntsug, tus nqi yog 30% qis dua li cov khoom lag luam tuaj txawv teb chaws, nrog luv nqi rau kev txiav txim ntau;
5. Cov kev pabcuam zoo heev: Dual-kev txhawb nqa kev hais lus + ua raws li kev lis kev cai clearance + 1- xyoo warranty, pom zoo los ntawm cov neeg siv khoom.
ib - nres kev daws teeb meem
pab neeg tshaj lij
siab zoo
| Yam khoom | Tus nqi | Lus hais |
|---|---|---|
| Cov pa roj carbon purity | Ntau dua lossis sib npaug 99.99% (4N) / Ntau dua lossis sib npaug 99.999% (5N) | Tag nrho cov impurities Tsawg dua lossis sib npaug ntawm 100 ppm (4N); Tsawg dua los yog sib npaug rau 10 ppm (5N) |
| Kev ceev ceev | 1.85-1.95 g / cm³ | Txias isostatic nias, nplua nplej & isotropic |
| Flexural zog | Ntau dua lossis sib npaug li 45 MPa | Compressive zog Ntau tshaj los yog sib npaug rau 80 MPa |
| Tshauv Ntsiab Lus | Tsawg dua lossis sib npaug li 50 ppm | High -kub purification ua tiav |
| CTE (RT ~ 1500 degree) | 4.0-4.8 × 10⁻⁶ / degree | Zoo dimensional stability & thermal shock kuj |
| Thermal conductivity | 120–150 W/(m·K) | Uniform tshav kub faib |
| Kev tiv thaiv | 8–15 μΩ·m | Txawm hluav taws xob conductivity |
| Kev ua haujlwm tsis tu ncua. | 1400 ~ 1600℃(Nqus / Ar) | Max 2200℃nyob rau hauv inert cua |
| Max Temp. hauv Cua | Tsawg dua lossis sib npaug li 450℃(Uncoated) | Txog li 1800℃nrog SiC txheej |
| Loj Loj | Tsawg dua los yog sib npaug li 10 μm | Cov qauv ntom ntom rau high precision machining |
| Xaiv txheej txheej | SiC / PYC (Pyrolytic Carbon) | Los tiv thaiv -silicon infiltration, kev pab lub neej ntev dua |
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